1.1 This test method establishes a procedure for testing components used in ultra-high-purity gas distribution systems for ionic and organic surface residues.

1.2 This test method applies to in-line components containing electronics grade materials in the gaseous form.

1.3 Limitations: 

1.4 The values stated in SI units are to be regarded as the standards. The inch-pound units given in parentheses are for information only.

1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.

1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.