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SEMI E153

2010 Edition, March 2010

Complete Document

SPECIFICATION FOR AMHS SEM (AMHS SEM)



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Description / Abstract:

The scope of this standard is limited to the usage and description of material handling devices that support transport, storage or a combination of both transport and storage as perceived by a SEMI Equipment Communications Standard 2 (SECS-II) host that complies with the GEM model (as specified in § 11). It defines the view of the equipment through the SECS communication link. It does not define the internal operation of the equipment. It includes a specific transfer command state model and transport and storage system controller (TSSC) state model as the basis for all equipment of this class.

This document assumes that the GEM fundamental requirements and selected additional capabilities (as specified in § 11) have been implemented on the AMHS SEM equipment. It expands the GEM standard requirements and capabilities in the areas of state models (TSSC, transfer command, vehicle and carrier state models), collection events, alarm documentation, remote commands, data item variables, and material movement.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

Purpose

This standard establishes a Specific Equipment Model (SEM) for AMHS (AMHS SEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this standard is to facilitate the integration of AMHS SEM equipment into an automated (e.g., semiconductor fabrication) factory. This document accomplishes this by defining an operational model for AMHS SEM equipment as viewed by a factory automation controller (Host). This definition provides a standard host interface and equipment operational behavior (e.g., control, state models, data reports, and reporting levels). Several topics require additional activity that are within the scope of this standard: traffic management characteristics (queuing), parallel interface for carrier transfer (SEMI E84), transport and storage system controller architecture, and delivery of the transfer unit.