ASTM F1709-97(2016) [ Withdrawn ]

Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications (Withdrawn 2023)

standard by ASTM International , 05/01/2016

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Full Description

1.1 This specification covers pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices.

1.2 This standard sets purity grade levels, physical attributes, analytical methods, and packaging.

1.2.1 The grade designation is a measure of total metallic impurity content. The grade designation does not necessarily indicate suitability for a particular application because factors other than total metallic impurity may influence performance.

Product Details

Published:: 05/01/2016
Number of Pages:: 3
File Size:: 1 file , 66 KB
Note:: This product is unavailable in Russia, Ukraine, Belarus