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IEST RP-CC013.3 covers procedures for calibrating and verifying equipment used in char-acterizing cleanrooms and for determining intervals of calibration. The RP includes general procedures for calibrating aerosol generators, photometers, ane-mometers, airflow capture hoods, temperature measurement systems and devices, pressure and vacuum gauges, polymicrosphere (PSL) generators, aerosol diluters, and condensation nuclei counters. Where available, references for calibrating other instruments are provided
 

Document History

  1. IEST RP-CC013.3

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    Calibration Procedures and Guidelines for Selecting Equipment Used in Testing Cleanrooms and Other Controlled Environments

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  2. IEST RP-CC013.2


    Calibration Procedures and Guidelines for Selecting Equipment Used in Testing Cleanrooms and Other Controlled Environments

    • Historical Version