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Full Description

IEC 60747-14-3:2009 specifies requirements for semiconductor pressure sensors measuring absolute, gauge or differential pressures. The major technical change with regard to the previous edition is the addition of a new subclause 5.9 (measuring method of linearity).

This publication should be read in conjunction with IE C 60747-1:2006.
 

Document History

  1. IEC 60747-14-3 Ed. 2.0 b:2009

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    Semiconductor devices - Part 14-3: Semiconductor sensors - Pressure sensors

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  2. IEC 60747-14-3 Ed. 1.0 en:2001


    Semiconductor devices - Part 14-3: Semiconductor sensors - Pressure sensors

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