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BS ISO 21859:2019

Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment

standard by British Standard / International Organization for Standardization , 06/19/2019

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Full Description

This document specifies a test method for plasma resistance of ceramic components in semiconductor manufacturing equipment. It is applicable to ceramic components of plasma-resistant components in dry etching chambers used in semiconductor manufacturing.

Cross References:
ISO 4287
ISO 18452
ISO 3274


All current amendments available at time of purchase are included with the purchase of this document.
 

Product Details

Published:
06/19/2019
ISBN(s):
9780580962011
Number of Pages:
10
File Size:
1 file , 490 KB
Same As:
ISO 21859:2019
Product Code(s):
30350531, 30350531, 30350531
Note:
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