2016 Edition, June 1, 2016
Standard Test Method for On-Line Measurement of Residue After Evaporation of High-Purity Water
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Description / Abstract:
This test method covers the determination of dissolved organic and inorganic matter and colloidal material found in high-purity water used in the semiconductor, and related industries. This material is referred to as residue after evaporation (RAE). The range of the test method is from 0.001 μg/L (ppb) to 60 μg/L (ppb).