2016 Edition, June 1, 2016
Standard Test Method for On-Line Measurement of Residue After Evaporation of High-Purity Water
Active, Most Current
BUNDLE AND SAVE:
Item is contained in these product bundles
Need it fast? Ask for rush delivery.
Most backordered items can be rushed in from the publisher in as little as 24 hours. Some rush fees may apply.
Contact your nearest IHS Markit Office to request rush delivery of any backordered item.
Description / Abstract:
This test method covers the determination of dissolved organic and inorganic matter and colloidal material found in high-purity water used in the semiconductor, and related industries. This material is referred to as residue after evaporation (RAE). The range of the test method is from 0.001 μg/L (ppb) to 60 μg/L (ppb).