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ASTM E1577

2011 Edition, May 1, 2011

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Standard Guide for Reporting of Ion Beam Parameters Used in Surface Analysis



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Product Details:

  • Revision: 2011 Edition, May 1, 2011
  • Published Date: May 1, 2011
  • Status: Active, Most Current
  • Document Language: English
  • Published By: ASTM International (ASTM)
  • Page Count: 3
  • ANSI Approved: No
  • DoD Adopted: No

Description / Abstract:

This guide covers the information needed to characterize ion beams used in surface analysis.

This guide does not cover all information required to perform a sputter depth profile (see referenced documents), specify any properties of the specimen except its surface normal, and discuss the rationale for choosing a particular set of ion beam parameters (1, 2).2 This guide does assume that the ion flux has a unique direction, that is, is an ion beam, rather than a wide spectrum of velocity vectors more typical of a plasma.

This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

2 The boldface numbers given in parentheses refer to a list of references at the end of this guide.