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ASTM F1513

1999 Edition, December 10, 1999

Complete Document

Standard Specification for Pure Aluminum (Unalloyed) Source Material for Electronic Thin Film Applications

Includes all amendments and changes through Reapproval Notice , 2011

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Product Details:

  • Revision: 1999 Edition, December 10, 1999
  • Published Date: January 2011
  • Status: Active, Most Current
  • Document Language: English
  • Published By: ASTM International (ASTM)
  • Page Count: 2
  • ANSI Approved: No
  • DoD Adopted: No

Description / Abstract:

This specification covers pure aluminum metal (unalloyed) for use in evaporation sources and sputtering targets. This material is intended as a raw material for electronic applications. The material is used as-supplied in some cases (for example, as e-beam evaporation sources). In other instances it may be remelted, alloyed, cast and processed by the purchaser to make finished products (for example, sputtering targets).

This specification sets purity grade levels, physical attributes, analytical methods, and packaging.

The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.