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ASTM F154

2002 Edition, January 10, 2002

Complete Document

Standard Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces



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WITHDRAWN 2003; NO S/S
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Product Details:

  • Revision: 2002 Edition, January 10, 2002
  • Published Date: January 10, 2002
  • Status: Not Active, See comments below
  • Document Language: English
  • Published By: ASTM International (ASTM)
  • Page Count: 13
  • ANSI Approved: No
  • DoD Adopted: No

Description / Abstract:

The purpose of this guide is to list, illustrate, and provide reference for various characteristic features and contaminants that are seen on highly specular silicon wafers. Recommended practices for delineation and observation of these artifacts are referenced. The artifacts described in this guide are intended to parallel and support the content of the SEMI M18. These artifacts and common synonyms are arranged alphabetically in Tables 1 and 2 and illustrated in Figs. 1-68.