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ASTM F388

1984 Edition, January 27, 1984

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STANDARD METHOD FOR MEASUREMENT OF OXIDE THICKNESS ON SILICON WAFERS AND METALLIZATION THICKNESS BY MULTIPLE- BEAM INTERFERENCE (TOLANSKY METHOD)



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Product Details:

  • Revision: 1984 Edition, January 27, 1984
  • Published Date: January 1984
  • Status: Not Active, See comments below
  • Document Language: English
  • Published By: ASTM International (ASTM)
  • Page Count: 6
  • ANSI Approved: No
  • DoD Adopted: No

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