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ASTM F581

78th Edition, 1982

Complete Document

Standard Practice for Accelerated Aging of Photoresist

Includes all amendments and changes through Editorial Change 1, May 1991


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Product Details:

  • Revision: 78th Edition, 1982
  • Published Date: May 1991
  • Status: Not Active, See comments below
  • Document Language: English
  • Published By: ASTM International (ASTM)
  • Page Count: 2
  • ANSI Approved: No
  • DoD Adopted: No

Description / Abstract:



1. Scope

1.1 This practice covers a method for accelerated aging of liquid photosensitive photoresists.

NOTE 1--Method F 583, Test Method for Photoresist Cleanness-Filterability can be used in conjunction with this practice to obtain a measure of the photoresist shelf life.

1.2 The values stated in SI units are to be regarded as the standard. The values in parentheses are for information only.

1.3 This standard does not purport to address the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. For specific hazard statements see Section 7, Section X1.2, and paragraph 8.2.