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2001 Edition, June 10, 2001

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Standard Test Method for Measuring Resistivity Profiles Perpendicular to the Surface of a Silicon Wafer Using a Spreading Resistance Probe

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Product Details:

  • Revision: 2001 Edition, June 10, 2001
  • Published Date: June 10, 2001
  • Status: Not Active, See comments below
  • Document Language: English
  • Published By: ASTM International (ASTM)
  • Page Count: 19
  • ANSI Approved: No
  • DoD Adopted: No

Description / Abstract:

1. Scope

1.1 This test method covers measurement of the resistivity profile perpendicular to the surface of a silicon wafer of known orientation and type.

1.2 This test method may be used on epitaxial films, substrates, diffused layers, or ion-implanted layers, or any combination of these.

1.3 This test method is comparative in that the resistivity profile of an unknown specimen is determined by comparing its measured spreading resistance value with those of calibration standards of known resistivity. These calibration standards must have the same surface preparation, conductivity type, and crystallographic orientation as the unknown specimen.

1.4 This test method is intended for use on silicon wafers in any resistivity range for which there exist suitable standards. Polished, lapped, or ground surfaces may be used.

1.5 This test method is destructive in that the specimen must be beveled.

1.6 Correction factors, which take into account the effects of boundaries or local resistivity variations with depth, are needed prior to using calibration data to calculate resistivity from the spreading resistance values.

1.7 This test method is primarily a measurement for determining the resistivity profile in a silicon wafer. However, common practice is to convert the resistivity profile information to a density profile. For such purposes, a conversion between resistivity and majority carrier density is provided in Appendix X2.

1.8 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 9.