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ASTM F890

84th Edition, January 1, 1984

Complete Document

Standard Practice for Determining Pinhole Density in Photoresist Films Used in Microelectronic Device Processing

Includes all amendments and changes through Reapproval Notice , 1992


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WITHDRAWN 1996; NO S/S
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Product Details:

  • Revision: 84th Edition, January 1, 1984
  • Published Date: January 1992
  • Status: Not Active, See comments below
  • Document Language: English
  • Published By: ASTM International (ASTM)
  • Page Count: 3
  • ANSI Approved: No
  • DoD Adopted: No

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