The purpose of this standard is to prescribe the controls for the installation of silane systems and the recommended methods for storage or transfer of silane or its mixtures from a source of supply to a point of use to provide protection against injury, loss of life, and property damage.

This standard governs the installation of systems and sources that are used to store, transfer, or contain silane or silane mixtures. This standard includes guidance for siting, design of equipment, piping and controls, and the fabrication and installation of silane gas storage and closed-use systems. Additional guidance on operational steps associated with the use of silane and silane mixtures as well as fire protection, gas monitoring, ventilation, and related safeguards are provided.

The requirements of this standard apply to pure silane and silane mixtures with a silane content greater than 1.4% by volume. A concentration of 1.4% has been chosen as it represents the lower flammability limit (LFL) for this material in air under conditions of normal temperature and pressure. Silane containers include tube trailers, International Organization for Standardization (ISO) modules, cylinder packs with manifolded cylinders, and individual cylinders. Silane mixes containing other hazardous components (e.g., toxics) may have additional requirements beyond this standard. These other requirements shall also be taken into consideration and may exceed requirements in this standard.