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ISO 27893

1st Edition, August 15, 2011

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Vacuum technology — Vacuum gauges — Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge

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Description / Abstract:

This International Standard gives guidelines for the determination and reporting of measurement uncertainties arising during vacuum gauge calibration by direct comparison with a reference gauge carried out in accordance with ISO/TS 3567.

This International Standard describes methods for uniform reporting of uncertainties in vacuum gauge certificates. Uncertainties reported in accordance with the guidelines given in this International Standard are transferable in the sense that the uncertainty evaluated for one result can be used as a component in the uncertainty evaluation of another measurement or calibration in which the first result is used.

This International Standard defines two measurement models that are sufficient to cover most practical cases. However, it is possible that the models given cannot be applied to newly developed vacuum gauges.

The final uncertainty to be reported in a certificate is evaluated from the uncertainties of the input quantities and influence quantities. The principal quantities that can affect the result of a vacuum calibration are described; however, a complete list of the possible quantities that can have an influence on the final result lies outside the scope of this International Standard.

NOTE It is envisaged that future Technical Specifications will address the calibration of specific types of vacuum gauges.
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