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ISO DIS 18516

2015 Edition, March 2, 2015

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Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods

Includes all amendments and changes through Draft , March 2, 2015


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Description / Abstract:

This International Standard describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis. It applies to all methods of surface analysis which use a beam to analyse the chemical composition of surfaces. It applies to scanning instruments, where a finely focused beam is scanned over the sample in a preselected field of view as well to full field imaging instruments, where the field of view is simultaneously imaged by a broad beam, an imaging lens system and a pixelated detector.
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