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ISO DIS 21501-4

2016 Edition, May 17, 2016

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DETERMINATION OF PARTICLE SIZE DISTRIBUTION - SINGLE PARTICLE LIGHT-INTERACTION METHODS - PART 4: LIGHT SCATTERING AIRBORNE PARTICLE COUNTER FOR CLEAN SPACES



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Superseded By: ISO FDIS 21501-4

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NOW A FINAL DRAFT * SEE ISO FDIS 21501-4
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Description / Abstract:

This part of ISO 21501 describes a calibration and verification method for a light scattering airborne particle counter (LSAPC), which is used to measure the size distribution and particle number concentration of particles suspended in air. The light scattering method described in this part of ISO 21501 is based on single particle measurements. The typical size range of particles measured by this method is between 0.1 μm and 10 μm in particle size.

Instruments that conform to this part of ISO 21501 are used for the classification of air cleanliness in cleanrooms and associated controlled environments in accordance with ISO 14644-1 and ISO 14644-2, as well as the measurement of number and size distribution of particles in various environments.

The following parameters are within the scope of this part of ISO 21501:

— size setting;

— counting efficiency;

— size resolution;

— false count;

— maximum particle number concentration;

— sampling flow rate;

— sampling time;

— response rate;

— calibration Interval.
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