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ISO 13084:2018

Surface chemical analysis - Secondary ion mass spectrometry - Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer

standard by International Organization for Standardization , 11/01/2018

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Full Description

This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.

 

Product Details

Edition:
2nd
Published:
11/01/2018
Number of Pages:
22
File Size:
1 file , 1.7 MB
Same As:
BS ISO 13084:2018
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This product is unavailable in Ukraine, Russia, Belarus
 

Document History

  1. ISO 13084:2018

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    Surface chemical analysis - Secondary ion mass spectrometry - Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer

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  2. ISO 13084:2011


    Surface chemical analysis - Secondary-ion mass spectrometry - Calibration of the mass scale for a time-of-flight secondary-ion mass spectrometer

    • Historical Version