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SEMI M75

2009 Edition, March 2009

Complete Document

SPECIFICATIONS FOR POLISHED MONOCRYSTALLINE GALLIUM ANTIMONIDE WAFERS



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Description / Abstract:

These specifications cover the information required for the procurement of round, flatted GaSb wafers and the standard dimensional and orientation conventions for the supply of such wafers.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use

Purpose

The purpose of this document is to define standard descriptions for the parameters to be specified in the procurement and supply of round wafers of gallium antimonide (GaSb) monocrystalline material.