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3rd Edition, August 2004

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Description / Abstract:

This Recommended Practice (RP) covers testing methods for characterizing the performance of cleanrooms. It is intended to assist planners, designers, manufacturers, and customers in preparing detailed specifications for cleanroom procurement and for assuring cleanroom operational compliance. Performance tests are recommended for cleanrooms and clean zones in three operational phases (see Table 1). The tests are used to evaluate and characterize the overall performance of the cleanroom or clean zone system.

The test methods provide recommended test equipment and testing procedures for determining performance parameters. Where the test method is affected by the type of cleanroom, alternative procedures are defined. For some of the tests, alternative methods and instrumentation are described, so that different end-use considerations can be accommodated. Alternative methods are not necessarily equivalent, however.

In contractual agreements, the customer selects the specific tests appropriate to the cleanroom under consideration. Specific acceptance limits are also defined in contractual agreements.

The test methods may also be used or adapted for periodic monitoring of cleanroom or clean zone performance.


This Recommended Practice provides a set of recognized, standardized test procedures for determining cleanroom and clean zone performance.

The principal purpose of cleanroom and clean zone performance testing is characterization of airborne particulate cleanliness in accordance with ISO 14644-1.* Additional tests, such as those related to airflow characteristics, sources of particles, room pressurization, and environmental issues, provide a more complete characterization.

Data gathered through testing can be used to establish baselines, track trends, determine current operational status, and justify repairs or modification.

* If applicable, FED-STD-209