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SEMI S10 2007 Edition, March 1, 2007
Complete Document
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Includes all amendments and changes through Editorial Change , May 2010
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This guideline is intended to apply to the assessment of risks considering the lifecycle of the equipment.

NOTE 1: It can also be applied to processes or facilities.

This guideline outlines a hazard identification, risk estimation, and risk evaluation process.

NOTICE: This safety guideline does not purport to address all of the safety issues associated with its use. It is the responsibility of the users of this safety guideline to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.


The purpose of this guideline is to establish general principles for risk assessment to enable identification of hazards, risk estimation and risk evaluation in a consistent and practical manner. The document provides a framework for carrying out risk assessments on equipment in the semiconductor and similar industries and is intended for use by supplier and purchaser as a reference for EHS considerations.

Use of this safety guideline is intended to assist in the development of a strategy to prioritize and control risks.