|Description / Abstract
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|The scope of this Document is limited to heating systems
designed to change or maintain the temperature of process
NOTE 3: Equipment, such as ovens and heated substrate supports
(e.g., hotplates) intended to change or maintain the temperature of
substrates are not "PLHS," even if heat is transferred to a process
Deionized (DI) Water Heaters — Deionized (DI) water
heaters are included within the scope of this Document when the
heated DI water is used as a "process liquid" as defined in §
Heat Transfer Fluids (HTFs) — Where fluids are used to
transfer heat between heating systems and process liquids, they are
included within the scope of this Document. For the purpose of this
document, HTFs are limited to liquids.
Although the scope of SEMI S3 is PLHS, this guideline may be
used to evaluate subsystems to determine if integrating them into a
PLHS will cause the PLHS not to conform to this guideline.
NOTICE: SEMI Standards and Safety Guidelines do
not purport to address all safety issues associated with their use.
It is the responsibility of the users of the documents to establish
appropriate safety and health practices, and determine the
applicability of regulatory or other limitations prior to use.
The purpose of this Safety Guideline is to provide minimum
general safety considerations for the design and documentation of
heating systems used for changing or maintaining the temperatures
of process liquids used in semiconductor and flat panel display
This Safety Guideline provides several means (see Table 1) of
achieving a level of Risk no greater than Low (as defined by SEMI
S10 and SEMI S14) for process liquid heating systems (PLHS). The
choice of which means is used is not, however, a criterion for
determining conformance with this Document.
For several common PLHS configurations, this Safety Guideline
provides a prescriptive list of safety features to be incorporated
in the PLHS. Design and performance criteria for those safety
features are also provided. A PLHS that conforms to both the
prescriptive list of safety features and the design and performance
criteria for those safety features is presumed to achieve a risk
level of no greater than Low (as defined by SEMI S10 and SEMI S14)
and, thereby, conforms to this Safety Guideline.
Conformance with this Safety Guideline may also be achieved by
designing a PLHS and incorporating safety features that are
selected, designed, and perform such that the risk of the equipment
is no greater than Low, as assessed using SEMI S10 and SEMI S14 and
considering the hazards discussed within this Document.
NOTE 1: The second way of demonstrating conformance with this
Safety Guideline is intended to provide a way to demonstrate
conformance by PLHS configurations that are not among those for
which prescriptive lists of safety features are provided and by
PLHS configurations for which prescriptive lists are provided but
for which alternative means of achieving a level of Risk no greater
than Low (as defined by SEMI S10 and SEMI S14) are used.
|Additional Supplemental Documents