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SEMI E47.1 2006 Edition, November 1, 2006
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MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 mm WAFERS
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This standard is intended to specify 300 mm FOUPs over a reasonable lifetime of use, not just those in new condition. For this reason, the purchaser needs to specify a time period and the number and type of uses to which the FOUPs will be put. It is under these conditions that the FOUPs must remain in compliance with the requirements listed in § 6.